ASML remains the sole supplier of EUV lithography machines, each costing $150–180 million and consuming over 1 megawatt. TSMC and Samsung began mass-producing chips with EUV in 2019. ASML delivered its first High-NA EUV tool, EXE:5200, in 2025. Export controls block EUV sales to China, but ASML’s 2024 China revenue reached $7 billion, mainly from DUV systems.