The Ultraviolet Revolution: Inside the Invisible $150M Machines Shaping the Future of Microchips
ASML remains the only supplier of extreme ultraviolet (EUV) lithography machines, which cost $150–$180 million each and draw over 1 megawatt of power. TSMC and Samsung began commercial EUV chip production in 2019, with TSMC’s 7nm+ and Samsung’s 7LPP processes. ASML shipped its first High-NA EUV tool in 2025. Export controls prevent EUV sales to China; ASML’s 2024 China revenue was $7 billion, mainly from DUV tools.